Effects of NH3 Flow Rate During AlGaN Barrier Layer Growth on the Material Properties of AlGaN/GaN HEMT Heterostructure
Crossref DOI link: https://doi.org/10.1007/s11664-017-5550-5
Published Online: 2017-05-16
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lumbantoruan, Franky J.
Wong, Yuen-Yee
Huang, Wei-Ching
Yu, Hung-Wei
Chang, Edward-Yi
Funding for this research was provided by:
National Science Council (MOST-104-2911-I-009-301)
National Science Council (TW) (MOST-103-2221-E-155-063)
License valid from 2017-05-16