Growth and Comparison of Residual Stress of AlN Films on Silicon (100), (110) and (111) Substrates
Crossref DOI link: https://doi.org/10.1007/s11664-017-5924-8
Published Online: 2017-11-21
Published Print: 2018-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pandey, Akhilesh
Dutta, Shankar
Prakash, Ravi
Raman, R.
Kapoor, Ashok Kumar
Kaur, Davinder
License valid from 2017-11-21