Residual Deformations and Mechanical Stresses in Macroporous and Nonporous Silicon Under Normal Etching Conditions
Crossref DOI link: https://doi.org/10.1007/s11664-020-08319-z
Published Online: 2020-07-23
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Konin, K. P. http://orcid.org/0000-0002-6998-9916
Gudymenko, O. Yo.
Klad’ko, V. P.
Lytvynenko, O. O.
Morozovs’ka, D. V.
Text and Data Mining valid from 2020-07-23
Version of Record valid from 2020-07-23
Article History
Received: 1 July 2020
Accepted: 7 July 2020
First Online: 23 July 2020