Impact of Film Stress and Film Thickness Process Control on GaAs-TiAu Metal Adhesion
Crossref DOI link: https://doi.org/10.1007/s11664-020-08521-z
Published Online: 2020-10-19
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Connors, Michael K. http://orcid.org/0000-0002-1916-5089
Coletta, Jennifer P.
Sheehan, Michael J.
Text and Data Mining valid from 2020-10-19
Version of Record valid from 2020-10-19
Article History
Received: 17 December 2019
Accepted: 24 September 2020
First Online: 19 October 2020
Conflict of interest
: The authors declare that they have no conflict of interest.