Effect of the Variation of Film Thickness on the Properties of Multilayered Si-Doped Diamond-Like Carbon Films Deposited on SUS 304, Al and Cu Substrates
Crossref DOI link: https://doi.org/10.1007/s11665-020-05310-x
Published Online: 2020-11-18
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, An
Chen, Qingchun
Wu, Guizhi
Huang, Xin
Wang, Yunfeng
Lu, Zhibin
Zhang, Guangan
Nie, Xiangfan
Text and Data Mining valid from 2020-11-18
Version of Record valid from 2020-11-18
Article History
Received: 27 April 2020
Revised: 30 August 2020
Accepted: 3 October 2020
First Online: 18 November 2020