Acoustic bubble array-induced jet flow for cleaning particulate contaminants on semiconductor wafers
Crossref DOI link: https://doi.org/10.1007/s11814-022-1214-0
Published Online: 2022-11-12
Published Print: 2022-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Daegeun
Hong, Jiwoo
Chung, Sang Kug
Text and Data Mining valid from 2022-11-12
Version of Record valid from 2022-11-12
Article History
Received: 1 June 2022
Revised: 21 June 2022
Accepted: 25 June 2022
First Online: 12 November 2022