Substrate Heating Effect on c-Axis Texture and Piezoelectric Properties of AlN Thin Films Deposited by Unbalanced Magnetron Sputtering
Crossref DOI link: https://doi.org/10.1007/s11837-016-1893-2
Published Online: 2016-03-29
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hasheminiasari, Masood
Lin, Jianliang
Text and Data Mining valid from 2016-03-29