The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption
Crossref DOI link: https://doi.org/10.1007/s12206-015-1101-2
Published Online: 2015-12-12
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Dasol
Lee, Hyunseop
Jeong, Haedo
Text and Data Mining valid from 2015-12-01