Mathematical modeling based on contact mechanism due to elastic and plastic deformation of pad asperities during CMP
Crossref DOI link: https://doi.org/10.1007/s12206-019-1230-0
Published Online: 2020-01-10
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Hyunjin
Shin, Somin
Lee, Dasol
Jeong, Haedo
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 4 March 2019
Revised: 10 March 2019
Accepted: 19 November 2019
First Online: 10 January 2020