SANTA: Self-aligned nanotrench ablation via Joule heating for probing sub-20 nm devices
Crossref DOI link: https://doi.org/10.1007/s12274-016-1180-0
Published Online: 2016-07-13
Published Print: 2016-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xiong, Feng
Deshmukh, Sanchit
Hong, Sungduk
Dai, Yuan
Behnam, Ashkan
Lian, Feifei
Pop, Eric
License valid from 2016-07-13