Discretely-supported nanoimprint lithography for patterning the high-spatial-frequency stepped surface
Crossref DOI link: https://doi.org/10.1007/s12274-020-3261-3
Published Online: 2021-01-05
Published Print: 2021-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Chunhui
Fan, Yu
Shao, Jinyou
Yang, Zhengjie
Sun, Jiaxing
Tian, Hongmiao
Li, Xiangming
Text and Data Mining valid from 2021-01-05
Version of Record valid from 2021-01-05
Article History
Received: 2 September 2020
Revised: 4 November 2020
Accepted: 23 November 2020
First Online: 5 January 2021