Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error
Crossref DOI link: https://doi.org/10.1007/s12541-014-0534-3
Published Online: 2014-09-07
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Kwangrak
Kim, Seongryong
Kwon, Soonyang
Pahk, Heui Jae
Text and Data Mining valid from 2014-09-01