A stiffness modeling approach for multi-leaf spring mechanism supporting coupling error analysis of nano-stages
Crossref DOI link: https://doi.org/10.1007/s12541-017-0102-8
Published Online: 2017-06-07
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lu, Shuai-Shuai
Yan, Peng
License valid from 2017-06-01