Effect of Non-Ionic Surfactant on Chemical Mechanical Planarization Performance in Alkaline Copper Slurry
Crossref DOI link: https://doi.org/10.1007/s12541-018-0186-9
Published Online: 2018-11-13
Published Print: 2018-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Qinzhi http://orcid.org/0000-0001-9210-9211
Yang, Fei
Chen, Lan http://orcid.org/0000-0002-8121-657X
Cao, He
Text and Data Mining valid from 2018-11-01
Article History
Received: 11 January 2018
Revised: 27 June 2018
Accepted: 23 August 2018
First Online: 13 November 2018