Improved Measurement of Thin Film Thickness in Spectroscopic Reflectometer Using Convolutional Neural Networks
Crossref DOI link: https://doi.org/10.1007/s12541-019-00260-4
Published Online: 2019-10-24
Published Print: 2020-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Min-Gab http://orcid.org/0000-0002-4161-8670
Text and Data Mining valid from 2019-10-24
Version of Record valid from 2019-10-24
Article History
Received: 12 August 2019
Revised: 14 October 2019
Accepted: 15 October 2019
First Online: 24 October 2019