Preparation and characterization of single (200)-oriented TiN thin films deposited by DC magnetron reactive sputtering
Crossref DOI link: https://doi.org/10.1007/s12598-015-0517-2
Published Online: 2015-07-16
Published Print: 2022-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Zhen-Dong http://orcid.org/0000-0002-9578-1297
Lai, Zhen-Quan
Text and Data Mining valid from 2015-07-16
Version of Record valid from 2015-07-16
Article History
Received: 10 March 2014
Revised: 24 April 2014
Accepted: 9 May 2015
First Online: 16 July 2015