Design and Fabrication of Bulk Micro-machined, High Resilience, High-Q, High Tilt Angle, Low Driving Voltage, Flexure Beam Micro-mirrors on Mono-crystalline Silicon
Crossref DOI link: https://doi.org/10.1007/s12633-014-9259-2
Published Online: 2015-05-14
Published Print: 2016-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kurhekar, Anil Sudhakar
Apte, P. R.
Duttagupta, S. P.
Text and Data Mining valid from 2015-05-14