Synthesis and Characterization of Porogen Based Porous Low-k Thin Films
Crossref DOI link: https://doi.org/10.1007/s12633-016-9475-z
Published Online: 2016-11-30
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pawar, Namrata B.
Mhaisagar, Yogesh S.
Gaikwad, Anil S.
Mahajan, Ashok M.
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