Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates
Crossref DOI link: https://doi.org/10.1007/s13204-015-0432-8
Published Online: 2015-03-22
Published Print: 2016-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Amirzada, Muhammad Rizwan
Tatzel, Andreas
Viereck, Volker
Hillmer, Hartmut
License valid from 2015-03-22