Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure
Crossref DOI link: https://doi.org/10.1007/s13320-023-0682-0
Published Online: 2023-03-21
Published Print: 2023-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lei, Cheng
Guan, Yihao
Liang, Ting
Wu, Xuezhan
Bai, Yuehang
Gong, Mingfeng
Jia, Pingang
Xiong, Jijun
Text and Data Mining valid from 2023-03-21
Version of Record valid from 2023-03-21
Article History
Received: 24 October 2022
Revised: 31 January 2023
First Online: 21 March 2023