Simulation by COMSOL of Effects of Probe on Inductively Coupled Argon Plasma
Crossref DOI link: https://doi.org/10.1007/s13538-020-00821-3
Published Online: 2021-01-13
Published Print: 2021-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shahbazian, A.
Salem, M. K.
Ghoranneviss, M.
Text and Data Mining valid from 2021-01-13
Version of Record valid from 2021-01-13
Article History
Received: 27 August 2020
Accepted: 4 November 2020
First Online: 13 January 2021