Fabrication and Characterization of TaxN Thin Films Deposited by DC Magnetron Sputtering Technique: Application in Microelectronic Devices
Crossref DOI link: https://doi.org/10.1007/s13538-022-01164-x
Published Online: 2022-08-06
Published Print: 2022-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gholami, M.
Khojier, K.
Monsefi, Mehrdad
Borghei, Seyed Majid
Text and Data Mining valid from 2022-08-06
Version of Record valid from 2022-08-06
Article History
Received: 2 January 2022
Accepted: 5 July 2022
First Online: 6 August 2022
Declarations
:
: The authors declare no competing interests.