Multi-dimensional electrostatic plasma simulations using the particle-in-cell method for the low-temperature plasmas for materials processing
Crossref DOI link: https://doi.org/10.1007/s40042-021-00375-w
Published Online: 2022-01-05
Published Print: 2022-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jo, Young Hyun
Cheon, Cheongbin
Park, Heesung
Hur, Min Young
Lee, Hae June
Text and Data Mining valid from 2022-01-05
Version of Record valid from 2022-01-05
Article History
Received: 25 August 2021
Revised: 10 November 2021
Accepted: 10 November 2021
First Online: 5 January 2022