Novel one-component positive-tone chemically amplified i-line molecular glass photoresist based on tannic acid
Crossref DOI link: https://doi.org/10.1007/s40242-015-5016-3
Published Online: 2015-07-10
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wei, Qi
Wang, Liyuan
Text and Data Mining valid from 2015-07-10