Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field
Crossref DOI link: https://doi.org/10.1007/s40314-021-01480-z
Published Online: 2021-03-17
Published Print: 2021-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Barba, Paolo Di
Fattorusso, Luisa
Versaci, Mario http://orcid.org/0000-0003-3837-6671
Text and Data Mining valid from 2021-03-17
Version of Record valid from 2021-03-17
Article History
Received: 11 December 2020
Revised: 4 March 2021
Accepted: 8 March 2021
First Online: 17 March 2021