An analysis of electrostatically actuated micro vibrating structures incorporating squeezed film damping effect using an electrical equivalent circuit
Crossref DOI link: https://doi.org/10.1007/s40430-016-0492-z
Published Online: 2016-01-29
Published Print: 2017-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kavitha, C.
Ganesh Madhan, M.
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