Mechanical model of nanoparticles for material removal in chemical mechanical polishing process
Crossref DOI link: https://doi.org/10.1007/s40544-016-0112-z
Published Online: 2016-06-15
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Hao
Guo, Dan
Xie, Guoxin
Pan, Guoshun
Text and Data Mining valid from 2016-06-01
Version of Record valid from 2016-06-15
Article History
Received: 4 March 2016
Revised: 21 April 2016
Accepted: 5 May 2016
First Online: 15 June 2016