Atomistic understanding of rough surface on the interfacial friction behavior during the chemical mechanical polishing process of diamond
Crossref DOI link: https://doi.org/10.1007/s40544-023-0760-8
Published Online: 2023-07-04
Published Print: 2024-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yuan, Song
Guo, Xiaoguang
Wang, Hao
Kang, Renke
Gao, Shang
Text and Data Mining valid from 2023-07-04
Version of Record valid from 2023-07-04
Article History
Received: 1 January 2023
Revised: 11 February 2023
Accepted: 15 March 2023
First Online: 4 July 2023