Numerical Experiment Using Direct Simulation Monte Carlo for Improving Material Deposition Uniformity During OLED Manufacturing
Crossref DOI link: https://doi.org/10.1007/s40684-021-00370-3
Published Online: 2021-07-16
Published Print: 2022-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sohn, Ilyoup http://orcid.org/0000-0002-8810-4343
Seo, Insoo
Lee, Sanghyun
Jeong, Sean
Funding for this research was provided by:
Korea Institute of Science and Technology Information (K20L04C03)
Text and Data Mining valid from 2021-07-16
Version of Record valid from 2021-07-16
Article History
Received: 20 August 2020
Revised: 26 May 2021
Accepted: 26 June 2021
First Online: 16 July 2021