On estimation of growth velocity of films during magnetron sputtering
Crossref DOI link: https://doi.org/10.1007/s41683-023-00119-x
Published Online: 2023-08-28
Published Print: 2023-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pankratov, E. L.
Text and Data Mining valid from 2023-08-28
Version of Record valid from 2023-08-28
Article History
Received: 20 May 2023
Revised: 5 June 2023
Accepted: 18 July 2023
First Online: 28 August 2023
Declarations
:
: Author has no any conflicts of interests.