Design and Analysis of MEMS Shunt Capacitive Switch with Si3N4 Dielectric and Au Beam Material to Improve Actuation Voltage and RF Performance in Consideration With and Without Circular Perforations
Crossref DOI link: https://doi.org/10.1007/s42341-019-00112-y
Published Online: 2019-04-20
Published Print: 2019-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kurmendra, http://orcid.org/0000-0003-2770-9418
Kumar, Rajesh
Text and Data Mining valid from 2019-04-20
Article History
Received: 5 November 2018
Revised: 9 March 2019
Accepted: 16 April 2019
First Online: 20 April 2019