Residual Strain in the AlN Layers Deposited by Reactive-Gas Pulsed Sputtering Deposition
Crossref DOI link: https://doi.org/10.1007/s42341-020-00204-0
Published Online: 2020-06-25
Published Print: 2020-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Choi, Jun-Seck
Ko, Dong-Wan
Cho, Sung-Min
Lee, Sang-Tae
Chang, Ji-Ho
Text and Data Mining valid from 2020-06-25
Version of Record valid from 2020-06-25
Article History
Received: 17 June 2019
Revised: 23 May 2020
Accepted: 30 May 2020
First Online: 25 June 2020