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Molecular Dynamics Simulation on Hydrogen Ion Implantation Process in Smart-Cut Technology

Crossref DOI link: https://doi.org/10.1016/S0894-9166(16)30100-8

Published Print: 2016-04

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Wang, Bing

Gu, Bin

Zhang, Hongbin

Feng, Xiqiao
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This article is maintained by: Elsevier

Article Title: Molecular Dynamics Simulation on Hydrogen Ion Implantation Process in Smart-Cut Technology

Journal Title: Acta Mechanica Solida Sinica

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/S0894-9166(16)30100-8

Content Type: article

Copyright: Copyright © 2016 The Chinese Society of Theoretical and Applied Mechanics. Published by Elsevier Ltd. All rights reserved.