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High-resolution non-destructive three-dimensional imaging of integrated circuits

Crossref DOI link: https://doi.org/10.1038/nature21698

Published Online: 2017-03-15

Published Print: 2017-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Holler, Mirko

Guizar-Sicairos, Manuel

Tsai, Esther H. R.

Dinapoli, Roberto

Müller, Elisabeth

Bunk, Oliver

Raabe, Jörg

Aeppli, Gabriel
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Text and Data Mining valid from 2017-03-01
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Article History

Received: 7 October 2016

Accepted: 7 February 2017

First Online: 15 March 2017

Competing interests

: The authors declare no competing financial interests.