Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
Crossref DOI link: https://doi.org/10.1038/ncomms5243
Published Online: 2014-06-27
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chang, Chieh
Sakdinawat, Anne
Text and Data Mining valid from 2014-06-27
Version of Record valid from 2014-06-27
Article History
Received: 17 January 2014
Accepted: 28 May 2014
First Online: 27 June 2014
Competing interests
: The authors declare no competing financial interests.