Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus
Crossref DOI link: https://doi.org/10.1038/s41377-022-00962-x
Published Online: 2022-12-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Zhaoqing
Allegre, Olivier
Li, Lin https://orcid.org/0000-0003-2627-2517
Text and Data Mining valid from 2022-12-02
Version of Record valid from 2022-12-02
Article History
Received: 8 December 2021
Revised: 5 July 2022
Accepted: 18 August 2022
First Online: 2 December 2022
Competing interests
: The authors have no competing interests.