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Integrated optical-readout of a high-Q mechanical out-of-plane mode

Crossref DOI link: https://doi.org/10.1038/s41377-022-00966-7

Published Online: 2022-09-28

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Guo, Jingkun

Gröblacher, Simon https://orcid.org/0000-0003-3932-7820
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Text and Data Mining valid from 2022-09-28

Version of Record valid from 2022-09-28
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Article History

Received: 12 May 2022

Revised: 10 August 2022

Accepted: 22 August 2022

First Online: 28 September 2022

Conflict of interest

: The authors declare no competing interests.