Single-lens dynamic $$z$$-scanning for simultaneous in situ position detection and laser processing focus control
Crossref DOI link: https://doi.org/10.1038/s41377-023-01303-2
Published Online: 2023-11-17
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Du, Xiaohan
Florian, Camilo
Arnold, Craig B. http://orcid.org/0000-0002-0293-5411
Text and Data Mining valid from 2023-11-17
Version of Record valid from 2023-11-17
Article History
Received: 22 June 2023
Revised: 2 October 2023
Accepted: 9 October 2023
First Online: 17 November 2023
Conflict of interest
: The authors declare no competing interests.