Thermoelastic damping in MEMS gyroscopes at high frequencies
Crossref DOI link: https://doi.org/10.1038/s41378-022-00480-1
Published Online: 2023-01-16
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Schiwietz, Daniel
Weig, Eva M.
Degenfeld-Schonburg, Peter
Text and Data Mining valid from 2023-01-16
Version of Record valid from 2023-01-16
Article History
Received: 5 August 2022
Revised: 12 October 2022
Accepted: 7 November 2022
First Online: 16 January 2023
Conflict of interest
: The authors declare no competing interests.