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A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Crossref DOI link: https://doi.org/10.1038/s41378-023-00628-7

Published Online: 2023-11-29

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ge, Chang https://orcid.org/0000-0002-4036-5616
Cretu, Edmond https://orcid.org/0000-0002-6468-737X
License Information

Text and Data Mining valid from 2023-11-29

Version of Record valid from 2023-11-29
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Article History

Received: 27 September 2023

Revised: 23 October 2023

Accepted: 25 October 2023

First Online: 29 November 2023

Conflict of interest

: The authors declare no competing interests.