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Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance

Crossref DOI link: https://doi.org/10.1038/s41378-024-00753-x

Published Online: 2024-08-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Yan https://orcid.org/0009-0002-6149-0149
Lv, Tunan

Zhang, Junning

Yu, Hongbin https://orcid.org/0000-0002-1877-5387
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Text and Data Mining valid from 2024-08-07

Version of Record valid from 2024-08-07
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Article History

Received: 29 January 2024

Revised: 29 June 2024

Accepted: 1 July 2024

First Online: 7 August 2024

Conflict of interest

: The authors declare no competing interests.