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System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC

Published Online: 2025-01-20

Authors

Hong, Linze

Xiao, Ke

Song, Xiangyu

Lin, Liwei https://orcid.org/0000-0001-7083-624X
Xu, Wei https://orcid.org/0000-0001-6196-3693
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52105582)

Natural Science Foundation of Guangdong Province (2024A1515030026, 2022A1515010894)

Shenzhen Science and Technology Innovation Commission (JCYJ20220818095810023)

State Key Laboratory of Radio Frequency Heterogeneous Integration
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Text and Data Mining valid from 2025-01-20

Version of Record valid from 2025-01-20
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Article History

Received: 27 July 2024

Revised: 4 November 2024

Accepted: 4 December 2024

First Online: 20 January 2025

Competing interests

: The authors declare no competing interests.

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