Crossmark

Suspended graphene-based NEMS accelerometers with direct electrical readout

Published Online: 2025-05-28

Authors

Ding, Jie

He, Chang

Ma, Hongliang

Zhang, Wendong

Fan, Xuge https://orcid.org/0000-0002-8811-1615
License Information

Text and Data Mining valid from 2025-05-28

Version of Record valid from 2025-05-28
More Information

Article History

Received: 11 February 2025

Revised: 14 April 2025

Accepted: 4 May 2025

First Online: 28 May 2025

Competing interests

: Xuge Fan and Jie Ding are co-inventors on one patent about 2D NEMS accelerometers (Patent number: ZL202010852720.6). Xuge Fan, Chang He and Jie Ding are co-inventors on one patent’ application about 2D NEMS accelerometers (Application number: 202410443604.7). Xuge Fan, Hongliang Ma and Jie Ding are co-inventors on one patent’ application about 2D NEMS accelerometers (Application number: 202410443602.8). Xuge Fan and Jie Ding are co-inventors on four patents’ application about 2D NEMS accelerometers (Application numbers: 202410443601.3; 202410443606.6; 202311729727.9; 202311729731.5). The other authors have no competing financial interest.

Document is current