Cross-scale structures fabrication via hybrid lithography for nanolevel positioning
Crossref DOI link: https://doi.org/10.1038/s41378-025-01021-2
Published Online: 2025-08-26
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Jingwen
Wang, Shengtong
Li, Xinghui
Text and Data Mining valid from 2025-08-26
Version of Record valid from 2025-08-26
Article History
Received: 23 March 2025
Revised: 16 June 2025
Accepted: 7 July 2025
First Online: 26 August 2025
Competing interests
: The authors declare no competing interests.