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A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array

Published Online: 2026-03-24

Authors

Wang, Feiyun

Ouyang, Xuan

Hong, Linze

Song, Xiangyu

Xu, Wei https://orcid.org/0000-0001-6196-3693
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52105582)

National Natural Science Foundation of China (62474115)

Natural Science Foundation of Guangdong Province (2024A1515030026)
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Text and Data Mining valid from 2026-03-24

Version of Record valid from 2026-03-24
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Article History

Received: 14 September 2025

Revised: 16 January 2026

Accepted: 2 February 2026

First Online: 24 March 2026

Conflict of interest

: The authors declare no competing interests.

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