Crossmark

High speed biaxial piezoelectric MEMS micromirror with varifocal tunability

Crossref DOI link: https://doi.org/10.1038/s41378-026-01356-4

Published Online: 2026-07-17

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Shillingburg, Hunter

Lopez, Daniel https://orcid.org/0000-0001-7174-4013
License Information

Text and Data Mining valid from 2026-07-17

Version of Record valid from 2026-07-17
More Information

Article History

Received: 7 January 2026

Revised: 12 March 2026

Accepted: 7 April 2026

First Online: 17 July 2026

Ethics

Conflict of interest: The authors declare no competing interests.