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Authors
Hu, Yinpeng https://orcid.org/0009-0001-6425-0231
Sun, Yi https://orcid.org/0009-0004-7692-4354
Lu, Ye
Li, Huan https://orcid.org/0000-0002-8749-0385
Liu, Liu https://orcid.org/0000-0002-4927-9562
Shi, Yaocheng https://orcid.org/0000-0003-4489-8310
Dai, Daoxin https://orcid.org/0000-0002-2769-3009
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Article History
Received: 5 July 2024
Accepted: 16 December 2024
First Online: 2 January 2025
Competing interests
: D.D. and Y.Sun have a granted patent (grant number: CN110658584B/US11598921, PCT application number: PCT/CN2020/076340) on the silicon photonic MEMS switches based on split waveguide crossing presented in this paper. D.D., Y.Sun, and H.L. have a granted patent (grant number: CN112305676B) on the silicon photonic MEMS switches based on split waveguide crossing presented in this paper, which is also in progress of PCT patent application (application number: PCT/CN2021/078381). D.D., Y.H., and H.L. have filed a patent application (application number: CN116299874A) on the silicon photonic MEMS switches based on split waveguide crossing presented in this paper. The remaining authors declare no competing interests.
