Qiu, Zheru https://orcid.org/0000-0002-6465-026X
Singh, Neetesh https://orcid.org/0000-0001-9105-647X
Liu, Yang https://orcid.org/0000-0002-0508-1474
Ji, Xinru
Wang, Rui Ning
Kärtner, Franz X. https://orcid.org/0000-0001-8829-5461
Kippenberg, Tobias https://orcid.org/0000-0002-3408-886X
Article History
Received: 24 December 2024
Accepted: 2 May 2025
First Online: 6 June 2025
Competing interests
: T.J.K. is a cofounder and shareholder of LiGenTec SA, a start-up company offering Si3N4 photonic integrated circuits. The remaining authors declare no competing interests.