Shi, Baoqi https://orcid.org/0000-0002-3828-5131
Zheng, Ming-Yang
Hu, Yue
Zhao, Yunkai
Shang, Zhenyuan
Zhong, Zeying
Chen, Zhen
Luo, Yi-Han
Long, Jinbao
Sun, Wei
Ma, Wenbo
Xie, Xiu-Ping https://orcid.org/0009-0003-8339-4382
Gao, Lan
Shen, Chen
Wang, Anting https://orcid.org/0000-0002-0073-0375
Liang, Wei
Zhang, Qiang https://orcid.org/0000-0003-3482-3091
Liu, Junqiu https://orcid.org/0000-0003-2405-6028
Article History
Received: 24 August 2024
Accepted: 7 July 2025
First Online: 31 July 2025
Competing interests
: B. S., Y.-H. L., J. Long and J. Liu filed a patent application related to this work. C. S. and J. Liu are co-founders of Qaleido Photonics, a start-up that is developing heterogeneous silicon nitride integrated photonics technologies. The remaining authors declare no competing interests.