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Authors
Wang, Jing
Feng, Xuning
Yu, Yongzheng
Huang, Hai https://orcid.org/0000-0003-0795-4459
Zheng, Mengting
Xu, Yunkai
Wu, Junxiu
Yang, Ying https://orcid.org/0000-0001-8178-7391
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Article History
Received: 2 July 2023
Accepted: 19 April 2024
First Online: 5 June 2024
Competing interests
: Y. Yang and J. Wang filed a patent related to the fabrication of TSM submitted by Tsinghua University (Y. Yang and J. Wang are inventors, CN202211333875.4, granted patent application). The other authors declare no competing interests.
